Cheetah EVO

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  • Outstanding CT quality: High detail resolution and scan repeatability due to water-cooled tube option.
  • Increased efficiency through automated inspection and software assisted image review.
  • Easy-to-use dynamic image enhancement filters
  • Best available laminography
  • Dose monitoring for sensitive parts
  • Optional high load capacity (≤20 kg)

 

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FF35 CT

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  • Single or dual tube configuration for highest versatility in laboratory micro-CT applications
  • New VistaX software packages for best-in-class image quality and speed
  • Precise manipulation and temperature stability
  • Various CT trajectories and FOV extensions
  • Metrology version available
  • Special version for the semiconductor sector available

 

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Photomask Cleaning Cassettes – PC Series

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Photomask Cleaning Cassettes - PC Series
Four-slot fixed handled photomask cleaning cassettes allows for a mask to be lowered into a wet bench for periodic cleaning requirements. Cassette construction is PTFE virgin Teflon® with PFA fasteners. Designed for ISO Class 3 (FS209E Class 1) Chemical resistant Thermal environments up to 80° C Minimum quantity order: 2 pieces.

 

Specification:
Wafer Size 4", 5", 6", 7", 9"
Dimensions Varies by Product
Weight Varies by Product

Open End Wall Cassette

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Open End Wall Cassette
Conventional 25-slot aluminum metal cassettes used in semiconductor manufacturing operations. Typically used in areas where wafer positioning is important or where elevated temperatures cause warping to other carriers. Features open end wall, PTFE wafer stops and hard clear (HC) anodization surface finish for abrasion resistance and longevity. Designed for ISO Class 3 (FS209E Class 1). Thermal environments up to 250° C.

 

Specification:
Wafer Size 76, 100, 150, 200

Stainless Steel Thermal Process Cassettes – SSC Series

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SSC
Industry standard open side wall high temperature 25-slot all-welded stainless steel metal cassettes used in semiconductor manufacturing operations. Typically used for high thermal processes, polyimide bake, and for ultrasonic cleaning applications. Designed for ISO Class 3 (FS209E Class 1) Thermal environments up to 550° C.

 

Specification:
Wafer Size 76, 100, 150, 200

300mm Aluminum Cassette – MC12 Series

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MC12 Series
Automation compatible 25-slot all T6061 aluminum construction thermal process cassette used in semiconductor manufacturing operations worldwide. 300mm SEMI compliant design attributes. Weight reduction architecture with side handles for operator ergonomic comfort and safety. Features wafer retaining lock bar to prevent wafers from sliding out during transport. Hard clear (HC) anodization surface fi nish. All welded construction to reduce thermal expansion/contraction issues and preserve dimensional stability. Designed for ISO Class 3 (FS209E Class 1) Thermal environments up to 350° C. Weight:7.2 lbs. (3.2kg).

 

Specification:
Wafer Size 300

Process Aluminum Casssttes – MCF Series

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MCF6EN
A special application all-aluminum metal cassette used in place of a plastic cassette in load-locks, OEM applications and advanced wafer handling applications. Finish coating is electroless nickel (EN) or bare polished aluminum (HV) with vacuum vented screws. Designed for ISO Class 3 (FS209E Class 1). Thermal environments up to 350° C.

 

Specification:
Wafer Size 150, 200

Automatic Notch Aligner – ANFEZ

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ANFEZQ
Tabletop automatic EZ Guide™ aligner bulk aligns wafer notches to +/- 1° accuracy. 16-position notch location switch allows for positioning at common industry final notch locations. ESD-safety controlled with static dissipative materials grounding both the wafer and cassette. Features quick-disconnect roller assembly for simple maintenance and cleaning. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.

 

Specification:
Wafer Size 150, 200
Power Requirements 12VDC/2 Amps 120VAC/12VDC power supply included
Throughput 100 Cassttes per hour
Weight 3 lbs

Manual Notch Aligner – NFEZ

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NFEZQ
Tabletop manual top-bottom (180°- 0°) EZ Guide™ aligner accurately bulk aligns wafer notches. ESD-safety controlled with static dissipative materials grounding both the wafer and cassette. Features quick-disconnect roller assembly for simple maintenance and cleaning. Designed for ISO Class 5 (FS209E Class 10) Antistatic construction .Specify cassette model number(s) with order.

 

Specification:
Wafer Size 150, 200
Weight 4 lbs

Automatic Flat Aligner – AFEZ

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AFEZ
Tabletop automatic EZ Guide™ aligner bulk aligns wafer flats to +/- 1° accuracy. 16-position flat location switch allows for positioning at common industry final flat locations. ESD-safety controlled with static dissipative materials grounding both the wafer and cassette. Features quick-disconnect roller assembly for simple maintenance and cleaning. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.

 

Specification:
Wafer Size 76, 100, 125, 150, 200
Power Requirements 12VDC/2 Amps 120VAC/12VDC power supply included
Throughput 100 Cassttes per hour
Dimensions 7" x 11" x 7"
Weight 4 lbs