Automatic M200 Opener – SMIFPO8

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SMIFPO8
Tabletop automatic M200 style SMIF pod opener. SMIFPO8 automatically unlocks the center SMIF pod mechanism and lifts and stores the pod lid, allowing easy access to the inner wafer cassette. Simple one-button operation to open or close the pod. Customer to specify stage pod orientation when ordering - M200 front towards the operator (standard), or M200 front away from operator. Designed for ISO Class 3; Antistatic construction; Specify stage orientation when ordering; Specify pod model number with order.

 

Specification:
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately
Weight 40 lbs

Manual FOUP or FOSB Opener – FOMH

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FOMH
A manual two-handle tool for unlocking and removing FOUP or FOSB pod doors.  Operation is simple: insert tool into locks on pod,  twist the handle and the pod is unlocked.  Pull straight back to remove the door.  The ergonomic pistol-grip design is comfortable for operators and helps to prevent handling mistakes. Closing the door is the reverse procedure. lightweight and easy to use.

 

Specification:
Dimensions 13" wide x 4" tall x 6" deep
Weight 2 lbs

FOUP/FOSB Opener – AFO

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FOSB-Opener-AFO
This tabletop automatic 300mm FOUP door opener unlocks, removes and stores the FOUP door when accessing the wafers inside a FOUP. A rotating base mechanism below the FOUP allows for 360° degree rotation to position the open FOUP in the best ergonomic access position for the operator. Commonly installed at FOUP wash stations to disassemble and reassemble pods. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction.

 

Specification:
Wafer Size 300
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately
Throughput 90 FOUPs per hour
Weight 60 lbs

Individual Wafer Presenter – WPR

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WPR
Automatic single-wafer presenter designed to present a wafer to an operator for inspection or removal from the cassette and for macro inspection applications. The WPR can be used for wafer flipping (inverting) the wafer 180° degrees for backside applications. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number with order.

 

The WPR Features:
  • A rotating lift blade allowing full front side and backside wafer inspection from one operator position

 

Specification:
Wafer Size 76, 100, 150, 200
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately
Dimensions 16"W x 14"L x 21"H
Weight 50 lbs

Escalator + Aligner – AET

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AETWNA8
Tabletop automatic notch/flat finder and escalator aligns and escalates wafers in 0.20” (5mm) steps for ID mark reading. Cost-effective design provides full-lot wafer tracking at a fraction of the cost of fully automated OCR systems. Designed for ISO Class 3 (FS209E Class 1). Specify cassette model number with order.
The AET Features: 
  • Antistatic construction

 

Specification:
Wafer Size 150, 200
Power Requirements 12VDC at 3 Amps. 120VAC Power Supply Provided
Weight 35 lbs

Mask/Wafer Inspection Station – BLIS

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BLIS
Mask Inspection Station. The mask inspection station is a bright light station for macro examination of reticles, masks or wafers. Used with H-Square mask picks this allows operators to see the entire surface of the mask under bright light conditions. Dimensions are 18" x 18" x 18". Unit is supplied with optional yellow filter.
Specifications:
  1. Color temperature: 4000
  2. Lumens: 3995
  3. Equivalent Wattage: 42
  4. Input Current: 0.33 amps
  5. Input voltage: 120 VAC 50/60 Hz
  6. Dimmable: Yes
  7. Energy Star: Yes
  8. Average Life: 50000

 

Specification:
Wafer Size 76, 100, 150, 200, 300
Power Requirements 120VAC / 1 amp
Weight 25 lbs

Automatic Wafer Mover/Sorter 300mm – WS300

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WS300M
Standalone, automatic, single-wafer transfer and wafer mover. 300mm Wafer Sorter with the mapping end effector. An automated, stand-alone transfer tool. The cost-effective tool to reduce wafer breakage and scratches caused by manual wafer handling. This simple sorter is compatible with all SEMI compliant FOUP, FOSB, and metal cassettes. Wafers are gently lifted from cassette slots before being extracted or loaded. This reduces contact with the cassette, minimizing particle generation and wafer edge chipping. Designed for ISO Class 5 (FS209E Class 10).

 

WS300 Features:
  • Touchscreen control
  • 350 wafers per hour
  • Gravity End Effector with peek pads and snubber.
  • Wafer mapping checks for wafer presence, cross-slot, double stack
  • Combining wafers into one cassette *Multiple Recipe Modes
  • Antistatic construction

 

Specification:
Wafer Size 300mm
Power Requirements 24VDC 2.7A, 100-240VAC to 24VDC Power Supply Sold separately
Throughput 350 wafers per hour
Weight 350 lbs

Automatic Single Wafer Transfer and Wafer Sorter WS200

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WS200
A stand-alone tabletop automation system features two-cassette stage configuration. A cost-effective automation tool designed to reduce wafer breakage and scratches. Compatible with industry standard shipping, process, and metal cassettes. Provides a highly flexible control system that any operator can use with minimal training.
The tool is operated from a touch screen display.  Operators load the cassettes onto the stage.  To move wafers between cassettes, the operator can choose one of the three available modes:
  • Manual Mode
  • Quick Transfer Mode
  • Recipe Mode
A safe vacuum-less low-contact end-effector includes a wafer mapping sensor that maps wafer locations in each cassette and detects wafer presence for accurate movements.
Options:
  • SECS/GEM Tool Interface
  • Integrated OCR Automated
  • Pre-Aligner
Features:
  • Single wafer transfer
  • Lot split transfer
  • Merge applications
  • Pitch change applications
  • "Fill" loading/removing test wafers from a parent lot
  • Scratch reduction by eliminating manual wafer handling
  • Combining wafer lots/splitting lots/odd-even
  • Thin wafer handling (up to 2mm warpage)
  • MEMS or Taiko® (wafer edge end-effector option)

 

Specification:
Wafer Size 100mm- 200mm
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Specify when order

Bulk, Automatic Horizontal Wafer Transfer – LCT1AS12

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LCT1AS12
Tabletop, automatic FOUP to FOSB wafer transfer tool. Wafers are mapped, then gently bulk-lifted in the cassette; minimizing contact with the cassette and eliminating the chances of particulation, abrasion, or wafer edge chipping. The sturdy construction assures high reliability, low maintenance, small footprint saves valuable cleanroom space. Antistatic construction; Specify cassette model number(s) with order. Designed for ISO Class 3

 

The LCT1AS12 Features:
  • Touchscreen control
  • FOUP to FOSB
  • Mapping feature checks for cross slot, double stack and wafer presence
  • PVDF coated rods transfer 25 wafers at a time

 

Specification:
Wafer Size 300
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately
Throughput 60 cassettes per hour
Weight 75 lbs

Low Contact Wafer Transfer 76mm – 200mm LCT2

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LCT2
Tabletop, automatic high-value, thin wafer, compound wafer transfer tool. Wafers are gently bulk-lifted midpoint in the cassette slots before being extracted or loaded. This is to minimize contact with the cassette, eliminating chances of particulation or wafer edge chipping. High reliability and low maintenance. Small footprint saves valuable cleanroom space. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.

 

The LCT2 Features: 
  • Touchscreen control
  • PVDF coated rods transfer 25 wafers at one time
  • Door present detection
  • Wafer detection in cassette and in tool

 

Specification:
Wafer Size 76, 100, 150, 200
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately
Dimensions 10"W 30"L 16"H
Weight 40 lbs