Individual Wafer Presenter – WPR
Automatic single-wafer presenter designed to present a wafer to an operator for inspection or removal from the cassette and for macro inspection applications. The WPR can be used for wafer flipping (inverting) the wafer 180° degrees for backside applications. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number with order.
The WPR Features:
- A rotating lift blade allowing full front side and backside wafer inspection from one operator position
Specification:
Wafer Size | 76, 100, 150, 200 |
---|---|
Power Requirements | 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately |
Dimensions | 16"W x 14"L x 21"H |
Weight | 50 lbs |