Stainless Steel Thermal Process Cassettes – SSC Series

Industry standard open side wall high temperature 25-slot all-welded stainless steel metal cassettes used in semiconductor manufacturing operations. Typically used for high thermal processes, polyimide bake, and for ultrasonic cleaning applications. Designed for ISO Class 3 (FS209E Class 1) Thermal environments up to 550° C.


Wafer Size 76, 100, 150, 200