FOUP/FOSB Opener – AFO
This tabletop automatic 300mm FOUP door opener unlocks, removes and stores the FOUP door when accessing the wafers inside a FOUP. A rotating base mechanism below the FOUP allows for 360° degree rotation to position the open FOUP in the best ergonomic access position for the operator. Commonly installed at FOUP wash stations to disassemble and reassemble pods. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction.
Specification:
Wafer Size | 300 |
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Power Requirements | 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately |
Throughput | 90 FOUPs per hour |
Weight | 60 lbs |