Process Aluminum Casssttes – MCF Series

A special application all-aluminum metal cassette used in place of a plastic cassette in load-locks, OEM applications and advanced wafer handling applications. Finish coating is electroless nickel (EN) or bare polished aluminum (HV) with vacuum vented screws. Designed for ISO Class 3 (FS209E Class 1). Thermal environments up to 350° C.


Wafer Size 150, 200