Manual Flat Aligner – MFEZ

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MFEZ6
Tabletop manual top-bottom (180° - 0°) EZ Guide™ aligner accurately bulk aligns wafer flats. ESD-safety controlled with static dissipative materials grounding both the wafer and cassette. Features quick-disconnect roller assembly for simple maintenance and cleaning. Designed for ISO Class 5 (FS209E Class 10); Antistatic construction; Specify cassette model number(s) with order.

 

Specification:
Wafer Size 76, 100, 150, 200
Weight 3 lbs

Manual Flat Aligner – FFTBAS-456

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FFTBAS-456
Tabletop multiple wafer size manual top-bottom (180° - 0°) aligner accurately bulk aligns wafer flats. This antistatic model is compatible with most standard 4” (100mm), 5” (125mm), and 6” (150mm) plastic wet / dry process carriers, storage and shipping containers. Constructed of ESD-safe and chemical resistant antistatic polypropylene. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction, chemical resistant; Not compatible with most metal cassettes; Specify cassette model number(s) with order.

 

Specification:
Wafer Size 76, 100, 150
Weight 3 lbs

Manual Flat Aligner – FFTB1

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FFTB1
Tabletop manual top-bottom (180° - 0°) economy flat aligner accurately bulk aligns wafer flats. The FFTB1 is constructed of precision-machined, hard clear anodized, 6061 T-6 aluminum alloy for durability and long-life use. Each FFTB1 is size specific and is adjustable for different flat lengths. Designed for ISO Class 5 (FS209E Class 10); Compatible with AMC and SSC metal cassettes; Specify cassette model number(s) with order.

 

Specification:
Wafer Size 50, 76, 100, 125, 150, 200
Weight 4 lbs

Mechanical Wafer Picks

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MECHANICAL WAFER PICKS
MCP Series Edge Grip Picks:
An edge-grip normally closed (consistent-force) edge exclusion mechanical pick for handling round substrates from the wafer edge. The base material is ESD-safe polypropylene for longevity, antistatic properties, and general chemical resistance. The wafer contact pad is a perfluorinated O-ring strip for grip hold on the wafer without scratching or leaving out-gassing behind. Commonly used where double-sided wafers are being handled, also in application labs and for wafer rescue applications.

Mask Picks

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MASK PICKS
Side Grip Photomask Pick MPS2:
Industry-standard antistatic photomask picks handle the mask reticle from the SIDE tangential edges of the mask to reduce contamination by eliminating direct contact of mask chrome. MPS tools are designed with a 15° angle handle. Application includes removal from and placement into photo process, metrology, or storage container.

 

Horizontal Photomask Pick – MPH2:
Horizontal antistatic photomask picks handle across the mask, contacting the tangential edges of the mask to reduce contaminationby eliminating direct contact with the mask chrome area. MPH2 tools are designed with a 15° angle handle allowing for mask placement into photo process, metrology or storage containers. Designed for ISO Class 3 (FS209E Class 1) Antistatic construction, chemical resistant

 

Mask Pick Holder HMP:
An all electro-polished (EP) 304 stainless steel tabletop holder for storing mask picks when not being used. The HMP protects the mask grippers from damage and contamination. Designed for ISO Class 3 (FS209E Class 1). Antistatic Construction

Horizontal Handle Breeze – H2BST-12

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H2BST-12
The Breeze wand is non-contact wafer handling wand that employees the Bernoulli principle to lift and hold the substrate securely without touching it. Four "corral" pins keep the substrate centered on the wand. Ideally suited for wafers with etched cavities or Taiko wafers. The horizontal Breeze is ideal for removing substrates from a platen or cassette from the top down unloading.

 

Specification:
Wafer Size 12, 8, 6, 4, 3 inch

Vertical Handle Breeze

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Vertical Handle Breeze 12
The Breeze wand is non-contact wafer handling wand that employees the Bernoulli principle to lift and hold the substrate securely without touching it. Four "corral" pins keep the substrate centered on the wand. Ideally suited for wafers with etched cavities or Taiko wafers. the vertical Breeze is ideal for removing substrates from a platen or container.

 

Specification:
Wafer Size 12, 8, 6, 4, 3, 2 inch

Automatic RSP150 Opener – SMIFPO16

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SMIFPO16
Tabletop automatic RSP150 style reticle SMIF pod opener. SMIFPO16 unlocks 4-mechanism RSP150 pod base and lifts and stores the pod lid, allowing easy access to the inner masks. Simple one-button operation to open or close the pod. Safety features include Z-axis break system and a mask protrusion sensor. Compatible with all industry standard single and multi-stack RSP150 pods. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction.

 

Specification:
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately
Weight 60 lbs

Automatic M200 Opener – SMIFPO8

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SMIFPO8
Tabletop automatic M200 style SMIF pod opener. SMIFPO8 automatically unlocks the center SMIF pod mechanism and lifts and stores the pod lid, allowing easy access to the inner wafer cassette. Simple one-button operation to open or close the pod. Customer to specify stage pod orientation when ordering - M200 front towards the operator (standard), or M200 front away from operator. Designed for ISO Class 3; Antistatic construction; Specify stage orientation when ordering; Specify pod model number with order.

 

Specification:
Power Requirements 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately
Weight 40 lbs

Manual FOUP or FOSB Opener – FOMH

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FOMH
A manual two-handle tool for unlocking and removing FOUP or FOSB pod doors.  Operation is simple: insert tool into locks on pod,  twist the handle and the pod is unlocked.  Pull straight back to remove the door.  The ergonomic pistol-grip design is comfortable for operators and helps to prevent handling mistakes. Closing the door is the reverse procedure. lightweight and easy to use.

 

Specification:
Dimensions 13" wide x 4" tall x 6" deep
Weight 2 lbs