Low Contact Wafer Transfer 76mm – 200mm LCT2
Tabletop, automatic high-value, thin wafer, compound wafer transfer tool. Wafers are gently bulk-lifted midpoint in the cassette slots before being extracted or loaded. This is to minimize contact with the cassette, eliminating chances of particulation or wafer edge chipping. High reliability and low maintenance. Small footprint saves valuable cleanroom space. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.
The LCT2 Features:
- Touchscreen control
- PVDF coated rods transfer 25 wafers at one time
- Door present detection
- Wafer detection in cassette and in tool
Specification:
| Wafer Size | 76, 100, 150, 200 |
|---|---|
| Power Requirements | 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately |
| Dimensions | 10"W 30"L 16"H |
| Weight | 40 lbs |