Automatic Flat Aligner – AFEZ

Tabletop automatic EZ Guide™ aligner bulk aligns wafer flats to +/- 1° accuracy. 16-position flat location switch allows for positioning at common industry final flat locations. ESD-safety controlled with static dissipative materials grounding both the wafer and cassette. Features quick-disconnect roller assembly for simple maintenance and cleaning. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.

 

Specification:

Wafer Size	76, 100, 125, 150, 200
Power Requirements	12VDC/2 Amps 120VAC/12VDC power supply included
Throughput	100 Cassttes per hour
Dimensions	7" x 11" x 7"
Weight	4 lbs